Electron Beam Technology

Short Business Description
10 Angstroms sells and services the complete line of Elionix electron beam lithography (EBL) products in North America.
Long Business Description

10 Angstroms is a new company dedicated to bringing innovative systems and equipment to the R&D market. We provide both sales and service for advanced instrumentation. We enjoy our role in working with both the customer and manufacturer in the ever changing nanotechnology field. With more than 30 years of high technology sales and service experience, we understand the expectations required to satisfy all stakeholders. As your trusted and valued partner, we will help to ensure that we are responsive and offer the best solutions possible.
10 Angstroms sells and services the complete line of Elionix electron beam lithography (EBL) products in North America.

Business Website Address
Business Address
6 Executive Park Drive, North Billerica, MA 01862, USA
Long Business Description

AXIC, Inc. was founded in 1980 as a company to develop surface science equipment for the semiconductor, electronics, and general scientific community. Initial developments focused on x-ray and electron beam analysis of surfaces for compositional and film thickness analysis. These developments lead to the introduction of a stand alone x-ray fluorescence unit which was easily operated by fab personnel for the measurement of film composition and thickness. AXIC, Inc. now produces 3 XRF systems for coatings analysis in both development and production applications for the semiconductor, magnetic, and superconductor industries.

In 1992, AXIC entered the market of producing laser based reflectometers for the measurement of film thickness, index of refraction, and film absorption properties of transparent/translucent films for the semiconductor, optical and magnetics industries.

Shortly after, AXIC commenced the manufacture of plasma tools for cleaning, photoresist stripping, reactive ion etch (RIE), and plasma enhanced chemical vapor deposition (PECVD). Today these offerings include the MultiMode HF8, PlasmaStar, and BenchMark 800-II. Units are ideally suited for research and development and small scale productions. The plasma tools can be configured in various ways to meet the end users’ specific requirements.

Business Website Address
Business Address
891 Ames Ave., Milpitas, CA 95035, USA
Long Business Description

CVE designs and builds process solutions and has more than 50 years experience manufacturing Electron Beam (EB) systems and Vacuum Furnaces (VF’s) from its base in Cambridge UK.

In Collaboration with TWI CVE’s range of equipment includes systems ranging from 50 to 200 kV with beam powers up to 100 kW.

Professional engineering skills are applied to customer requirements resulting in innovative solutions to technical problems. The company’s skilled workforce, experienced engineering department and extensive service team are backed up with a range of in-house test and diagnostic facilities. CVE offers true global coverage from itssales and service centres in the UK and worldwide.

Cambridge Vacuum Engineering’s roots begin in the late 1950’s in Cambridge, England with the founding of Torvac, a company specialising in the manufacture of Electron Beam Welders and Vacuum Furnaces.

A break-a-way group formed Wentgate Engineers in the mid 1960’s and for many years the two companies traded in competition.

Torvac purchased the Hawker Siddley Dynamics “Dynaweld” technology, which added 150kV welders to their range.

Through the process of acquisition, both Wentgate and Torvac became owned by Thermal Scientific and in the late 1980’s, under their new TI Group ownership, the companies moved to their present site, rationalised themselves and began trading under the name, Cambridge Vacuum Engineering. Since October 2001 the company has been owned by Aquasium Technology Ltd.

2007 has seen strengthening of the CVE brand with WDI in the States now being known as CVE Inc.

CVE today manufactures Electron Beam Welders and Vacuum Furnaces . They also provide spares and service support for the 50 year history of Torvac, Wentgate and Dynaweld products.

CVE operates a Quality Management System which complies with the requirements of BS EN ISO 9001:2008.

Business Website Address
Business Address
Denny Industrial Centre, Pembroke Avenue, Waterbeach, Cammbridge CB25 9QX, UK
Long Business Description

Fil-Tech, Inc. is recognized worldwide for quality products, sold at competitive prices with same day shipping. We are a leading manufacturer and supplier of quality quartz crystals for thin film measurement and a leading manufacturer of thin film related hardware. Fil-Tech supplies the thin film, optical coating, ophthalmic and semiconductor industries with a range of competitively priced quality consumable items to keep our customers up and running.

Products:
Vacuum Measurement Gauges
Crystals, Hardware and Monitors
Electron Beam Gun Parts
Ion Source Parts
Vacuum Fluids and Greases & Filters
Leak Detector Parts

Business Website Address
Business Address
6 Pinckney St., Boston, MA 02114, USA
Long Business Description

Beijing Goodwill Metal Tech Co.LTD is the leading materials manufacturer and trader in China. For decades, our sputtering targets, evaporation materials, crucible liners and rare earth materials helped our customers achieving their innovations. Beijing Goodwill Metal Tech Co is the subsidiary of China’s the biggest material research institute-General Research Institute For NONFERROUS Metals. Having undertook research tasks for many years, we are experienced in producing for industries and research institutes with uniform quality. Therefore, we forces strict requirements on each piece of our products.

Doped Targets & Customizing Targets.
We are very delighted by our consistently qualified products supporting diversified industries. But, the best achievement we are proud of is that our products support progress in academic field. To satisfy customers’ experimental purpose, we can provide comprehensive doped targets and targets under user customizing. Products include:

Sputtering Targets:
High Purity Metal Targets
Alloy Targets
Ceramic Targets
Doped Targets
Precious Metal Targets

Evaporation Materials:
Metal Evaporation Materials
Oxide Evaporation Materials
Fluoride Evaporation Materials
Other Evaporation Materials
Evaporation Assistant Tools

High Purity Materials:
High Purity Alloy Materials
Super High Purity Metals
Precious Metals
Rare Earth Materials
Crystal Materials
Silicon Products
Electron Beam Gun

Business Website Address
Business Address
RM6B15,Huajie, Mansion,Haidian,Beijing, China
Long Business Description

We have a long standing commitment to quality and excellence in the high vacuum industry. Started in 1967 the company is a leader in manufacture of high vacuum equipment for thin film coating and etching.
Intlvac Thin Film’s primary goal is to deliver value-added solutions that exceed the expectations of simple PVD and Ion Beam Sputter/Etch machine manufacturing and installation.
We started exporting our systems around the world in 2001, and now have equipment installed across the US, and in Canada, Malaysia, Singapore, Australia, and Israel.
Research and development play a major role in our technology’s edge in the market. Our in-house development lab designs, engineers and manufactures machinery used for Physical Vapor Deposition and ion beam etching. We specialize in engineering solutions for a variety of specific results and outcomes using this process. We provide our customers with machinery needed for creating coatings including ion source and all parts needed to make it function. Additionally, we manufacture high quality PVD coatings using techniques such as Ion Assisted Thermal and Electron Beam Evaporation, Reactive and non-reactive magnetron sputtering. Diamond Like Carbon by Plasma Enhanced Vapor Deposition.
Intlvac Thin Film has become an authority for Ion Beam Etch/Sputter systems and reactive sputter systems for precision optical coatings.

Products & Services:
Thin Film Deposition Systems
Ion Beam Etch & Ion Beam Sputter Systems
Diamond-Like Carbon Systems
Optical Fiber Metalization
Thermal Vacuum & Space Simulation Systems
Ion Sources

Business Website Address
Business Phone or Fax
Fax: 716.284.0842
Business Address
1845 Maryland Ave., Niagara Falls, NY 14305, USA
Long Business Description

At Johnsen Ultravac (JUV), a Division of Johnsen Machine Company Limited we strive to build the highest quality, most reliable, vacuum equipment available anywhere. Our vacuum equipment delivers total value to our global customers in terms of payback, low maintenance, flexibility and durability.

If your materials research requires an ultra high vacuum chamber it may be of interest to know that our UHV chambers routinely operate in the 5 x 10E-11 Torr base pressure range.

If your research requires complex 6-axis XYZ manipulators or Linear translators JUV offers the widest range in UHV instrumentation. With optional electron beam heating and Helium cooled cryostats our modular sample holder arrangements are leading the industry in temperature range (10° K to 1,500° K), motion, accuracy and repeatability.

If Synchrotron Radiation Instrumentation is your interest the JUV SRI Product line for Light Sources includes Monochromators for X-ray Beam lines, Front-ends, Photon and Safety Shutters. Other SRI products include Collimators, Mask assemblies, Mirror chambers and Safety Shutters.

If your research is in Electro-photonic, Opto-electronics or Semi-conductor devices the JUV 6000 series combine the latest E-Beam Evaporation, ECR-CVD and ICP-CVD deposition technology.

If your research is in Materials Science, Nano Technology or Super Conductivity the JUV 6100 series combine the latest in RF-DC Sputtering, RF-ICP Plasma Spray and Pulsed LASER (PLD) deposition technology.

If you require products for testing of Satellite Instruments such as IR Sensors our products for the Aerospace Industry include Blackbodies, Bench coolers and Space Simulation Systems.

Also, with our staff of engineers with vacuum and cryogenic experience JUV leads the industry in CUSTOM design and manufacturing capabilities. Why not put the JUV team to work for you.

Business Website Address
Business Address
3470 Mainway, Burlington, Ontario L7M 1A8, Canada
k-Space Associates, Dexter MI, USA
Long Business Description

k-Space Associates, Inc. is a leading manufacturer of in situ, in-line, and ex situ metrology tools for the semiconductor, thin-film, and photovoltaic (PV) industries. Our tools are used for monitoring nearly all thin-film deposition processes, including MBE, MOCVD, PLD, PVD, sputtering, and evaporation. Incorporated in 1992 and driven to supply the best technical support in the industry, our tools are used worldwide in both research and full production monitoring of semiconductor, PV, thin-film deposition, annealing, and processing applications.

kSA products measure important parameters such as temperature, deposition rate, film thickness, stress, curvature, bow, reflectivity, surface roughness, and many other material properties. These are measured in real-time by utilizing probes such as lasers, white light, UV light sources, and electron beams to investigate thin-films and substrates at an atomic level. Our thin-film analysis tools are used to extract real-time information from today’s most advanced deposition and processing applications within compound semiconductor, silicon semiconductor and photovoltaic advanced thin film production and R&D.
Sophisticated software analysis and reporting capabilities provide information to better understand tomorrow’s electronic and optoelectronic devices or to provide online control during mass production to enhance yield. Tailored optics and fully integrated solutions have been designed for simple mounting and non-invasive monitoring of advanced deposition processes such as:
MBE
Sputtering
PLD
E-beam Evaporation
MOCVD
Ex Situ Characterization

Business Website Address
Business Address
2182 Bishop Circle East, Dexter, MI 48130, USA
Long Business Description

PVD Products, Inc. designs and manufactures thin film deposition systems and associated components based on the Physical Vapor Deposition (PVD) processes of pulsed laser deposition, magnetron sputtering , evaporation, as well as PECVD systems. PVD Products is a leading manufacturer of custom deposition systems, reel-to-reel deposition equipment for the coated-conductor market, and combinatorial deposition tools for rapid process development. Our customers include multiple high profile universities and national labs around the world, as well as start-up and Fortune 500 companies. PVD Products has a large customer base with many repeat orders.
Our equipment utilizes the highest quality vacuum and electronic components for long term reliable operation with minimal maintenance. In addition to our existing line of thin film deposition systems, in-house SEM and EDS, and thin film deposition services, we provide custom design services for unique deposition systems tailored to meet your specific needs at a reasonable price. The main categories for our products are as follows:
Pulsed Laser Deposition (PLD) Systems use a laser beam to vaporize a solid target material in order to produce a thin film with exactly the same chemical composition as the original target material. The PLD process enables the deposition of many materials over a wide range of background gas compositions and pressures.
Magnetron sputtering systems by PVD Products, Inc. provide a flexible processing platform for meeting your specific deposition requirements. A wide range of magnetron source options are available including; RF, DC, and pulsed DC magnetrons for metallic or reactive sputtering targets, in-situ tilt, and target sizes ranging from 25 mm to 100 mm in diameter
PVD Products, Inc. provides a full range of coated conductor systems for depositing High Temperature Supercondutor (HTS) materials and buffer layers on continuous metal tapes. Coated conductor deposition systems are available based on pulsed laser deposition, magnetron sputtering, and evaporation with Ion Beam Assisted Deposition. Reel-to-reel systems allow for deposition on substrate areas up to 10 square meters in a single run.
PVD Products’ complete thermal and electron beam evaporation systems are designed to meet the customer’s specific deposition needs. These systems can contain single or multiple thermal sources, multi-pocket e-beam sources, and multi-gun sources as required. Linear e-beam sources are also available.

Products:
Magnetron Sputtering Systems
Magnetron Sputtering Sources
PLD System Overview
PLD Components
Evaporation
Coated Conductor Systems
Substrate Heaters
Custom PVD

Services:
Scanning Electron Microscopy Services
Thin Film Deposition Services
Deposition System Design Services

Business Website Address
Business Address
35 Upton Drive, Suite 200, Wilmington, MA 01887, USA
Long Business Description

SEMTech Solutions is a leading supplier of refurbished SEMs and analytical FE-SEM services. WE are also a North American Sales and Service Representation Company that offers new scientific instrumentation based on electron beam technologies.

Business Website Address
Business Phone or Fax
Tel 978-663-9822
Business Address
6 Executive Park Dr, North Billerica, MA 01862, USA