Electron Beam Technology

Address: 6 Executive Park Drive, North Billerica, MA 01862, USA
Short Business Description: 10 Angstroms sells and services the complete line of Elionix electron beam lithography (EBL) products in North America.
Long Business Description:

10 Angstroms is a new company dedicated to bringing innovative systems and equipment to the R&D market. We provide both sales and service for advanced instrumentation. We enjoy our role in working with both the customer and manufacturer in the ever changing nanotechnology field. With more than 30 years of high technology sales and service experience, we understand the expectations required to satisfy all stakeholders. As your trusted and valued partner, we will help to ensure that we are responsive and offer the best solutions possible.
10 Angstroms sells and services the complete line of Elionix electron beam lithography (EBL) products in North America.

Business Website Address: http://www.10angstroms.com/
Address: 891 Ames Ave., Milpitas, CA 95035, USA
Long Business Description:

AXIC, Inc. was founded in 1980 as a company to develop surface science equipment for the semiconductor, electronics, and general scientific community. Initial developments focused on x-ray and electron beam analysis of surfaces for compositional and film thickness analysis. These developments lead to the introduction of a stand alone x-ray fluorescence unit which was easily operated by fab personnel for the measurement of film composition and thickness. AXIC, Inc. now produces 3 XRF systems for coatings analysis in both development and production applications for the semiconductor, magnetic, and superconductor industries.

In 1992, AXIC entered the market of producing laser based reflectometers for the measurement of film thickness, index of refraction, and film absorption properties of transparent/translucent films for the semiconductor, optical and magnetics industries.

Shortly after, AXIC commenced the manufacture of plasma tools for cleaning, photoresist stripping, reactive ion etch (RIE), and plasma enhanced chemical vapor deposition (PECVD). Today these offerings include the MultiMode HF8, PlasmaStar, and BenchMark 800-II. Units are ideally suited for research and development and small scale productions. The plasma tools can be configured in various ways to meet the end users’ specific requirements.

Business Website Address: http://www.axic.com/
Address: Denny Industrial Centre, Pembroke Avenue, Waterbeach, Cammbridge CB25 9QX, UK
Long Business Description:

CVE designs and builds process solutions and has more than 50 years experience manufacturing Electron Beam (EB) systems and Vacuum Furnaces (VF’s) from its base in Cambridge UK.

In Collaboration with TWI CVE’s range of equipment includes systems ranging from 50 to 200 kV with beam powers up to 100 kW.

Professional engineering skills are applied to customer requirements resulting in innovative solutions to technical problems. The company’s skilled workforce, experienced engineering department and extensive service team are backed up with a range of in-house test and diagnostic facilities. CVE offers true global coverage from itssales and service centres in the UK and worldwide.

Cambridge Vacuum Engineering’s roots begin in the late 1950’s in Cambridge, England with the founding of Torvac, a company specialising in the manufacture of Electron Beam Welders and Vacuum Furnaces.

A break-a-way group formed Wentgate Engineers in the mid 1960’s and for many years the two companies traded in competition.

Torvac purchased the Hawker Siddley Dynamics “Dynaweld” technology, which added 150kV welders to their range.

Through the process of acquisition, both Wentgate and Torvac became owned by Thermal Scientific and in the late 1980’s, under their new TI Group ownership, the companies moved to their present site, rationalised themselves and began trading under the name, Cambridge Vacuum Engineering. Since October 2001 the company has been owned by Aquasium Technology Ltd.

2007 has seen strengthening of the CVE brand with WDI in the States now being known as CVE Inc.

CVE today manufactures Electron Beam Welders and Vacuum Furnaces . They also provide spares and service support for the 50 year history of Torvac, Wentgate and Dynaweld products.

CVE operates a Quality Management System which complies with the requirements of BS EN ISO 9001:2008.

Business Website Address: http://www.camvaceng.com/
Address: 12 Hamada St., Rehovot, 76703, Israel
Long Business Description:

El-Mul Technologies is an innovative and experienced solution provider and OEM manufacturer of in-vacuum charged particle detection systems and devices.
With over 20 years of experience, El-Mul is recognized for its ground-breaking products, world-class quality standards and dedicated service.
El-Mul’s products are specially designed for advanced analytical SEM/TEM systems, focused ion beam (FIB) tools, inspection and metrology semiconductor e-beam tools, mass spectrometry and other vacuum systems

Business Website Address: http://www.el-mul.com/
Address: 6 Pinckney St., Boston, MA 02114, USA
Long Business Description:

Fil-Tech, Inc. is recognized worldwide for quality products, sold at competitive prices with same day shipping. We are a leading manufacturer and supplier of quality quartz crystals for thin film measurement and a leading manufacturer of thin film related hardware. Fil-Tech supplies the thin film, optical coating, ophthalmic and semiconductor industries with a range of competitively priced quality consumable items to keep our customers up and running.

Products:
Vacuum Measurement Gauges
Crystals, Hardware and Monitors
Electron Beam Gun Parts
Ion Source Parts
Vacuum Fluids and Greases & Filters
Leak Detector Parts

Business Website Address: http://www.filtech.com/
Address: RM6B15,Huajie, Mansion,Haidian,Beijing, China
Long Business Description:

Beijing Goodwill Metal Tech Co.LTD is the leading materials manufacturer and trader in China. For decades, our sputtering targets, evaporation materials, crucible liners and rare earth materials helped our customers achieving their innovations. Beijing Goodwill Metal Tech Co is the subsidiary of China’s the biggest material research institute-General Research Institute For NONFERROUS Metals. Having undertook research tasks for many years, we are experienced in producing for industries and research institutes with uniform quality. Therefore, we forces strict requirements on each piece of our products.

Doped Targets & Customizing Targets.
We are very delighted by our consistently qualified products supporting diversified industries. But, the best achievement we are proud of is that our products support progress in academic field. To satisfy customers’ experimental purpose, we can provide comprehensive doped targets and targets under user customizing. Products include:

Sputtering Targets:
High Purity Metal Targets
Alloy Targets
Ceramic Targets
Doped Targets
Precious Metal Targets

Evaporation Materials:
Metal Evaporation Materials
Oxide Evaporation Materials
Fluoride Evaporation Materials
Other Evaporation Materials
Evaporation Assistant Tools

High Purity Materials:
High Purity Alloy Materials
Super High Purity Metals
Precious Metals
Rare Earth Materials
Crystal Materials
Silicon Products
Electron Beam Gun

Business Website Address: http://www.goodwillmetal.co
Address: 111 Anza Blvd., Suite 110, Burlingame, CA 94010, USA
Long Business Description:

Vince Carlino founded ibss Group, Inc. in 2002 in order to continue developing field-free ion beam (IBS) deposition systems for EM specimen preparation. The IBS system and the Dimpler™, developed by VCR Group, set the standard for specimen deposition and preparation.
In 2003, ibss Group agreed to market a tool to minimize hydrocarbon contamination in SEMs by remote or downstream (DS) oxidation. Mr. Carlino assumed Global Sales responsibility to introduce an innovative plasma process for the removal of gas phase hydrocarbon contamination in electron beam instruments.
In 2007, ibss Group began cooperating with an inventor of a unique, patented plasma source. ibss Group developed and produced the GV10x, a new paradigm in situ downstream plasma asher. Competitively priced, the GV10x Downstream Asher reduces carbon & hydrocarbon contamination 10 to 20 times more effectively than traditional methods at vacuum pressure safe for TMP operation.
Today, ibss Group has expanded its GV10x models and has customers in EM and synchrotron labs around the world successfully using the GV10x and related products. All models have been tested and certified to carry the CE Mark. Further, the GV10x has been approved for use at its full range of power (10 to 99 watts) in Japan, where the Radio Law would normally limit its upper limit to 49 watts.
It is ibss Group’s mission to not only provide the fastest, safest, and most efficient plasma cleaner on the market, but also to develop and maintain long term relationships with customers and operators of the GV10x by providing quick response times and thorough explanations and support that exceed expectations.

Business Website Address: ibssgroup.com
Address: 1845 Maryland Ave., Niagara Falls, NY 14305, USA
Long Business Description:

We have a long standing commitment to quality and excellence in the high vacuum industry. Started in 1967 the company is a leader in manufacture of high vacuum equipment for thin film coating and etching.
Intlvac Thin Film’s primary goal is to deliver value-added solutions that exceed the expectations of simple PVD and Ion Beam Sputter/Etch machine manufacturing and installation.
We started exporting our systems around the world in 2001, and now have equipment installed across the US, and in Canada, Malaysia, Singapore, Australia, and Israel.
Research and development play a major role in our technology’s edge in the market. Our in-house development lab designs, engineers and manufactures machinery used for Physical Vapor Deposition and ion beam etching. We specialize in engineering solutions for a variety of specific results and outcomes using this process. We provide our customers with machinery needed for creating coatings including ion source and all parts needed to make it function. Additionally, we manufacture high quality PVD coatings using techniques such as Ion Assisted Thermal and Electron Beam Evaporation, Reactive and non-reactive magnetron sputtering. Diamond Like Carbon by Plasma Enhanced Vapor Deposition.
Intlvac Thin Film has become an authority for Ion Beam Etch/Sputter systems and reactive sputter systems for precision optical coatings.

Products & Services:
Thin Film Deposition Systems
Ion Beam Etch & Ion Beam Sputter Systems
Diamond-Like Carbon Systems
Optical Fiber Metalization
Thermal Vacuum & Space Simulation Systems
Ion Sources

Business Website Address: http://www.intlvac.com/
Business Phone or Fax: Fax: 716.284.0842
Address: 3470 Mainway, Burlington, Ontario L7M 1A8, Canada
Long Business Description:

At Johnsen Ultravac (JUV), a Division of Johnsen Machine Company Limited we strive to build the highest quality, most reliable, vacuum equipment available anywhere. Our vacuum equipment delivers total value to our global customers in terms of payback, low maintenance, flexibility and durability.

If your materials research requires an ultra high vacuum chamber it may be of interest to know that our UHV chambers routinely operate in the 5 x 10E-11 Torr base pressure range.

If your research requires complex 6-axis XYZ manipulators or Linear translators JUV offers the widest range in UHV instrumentation. With optional electron beam heating and Helium cooled cryostats our modular sample holder arrangements are leading the industry in temperature range (10° K to 1,500° K), motion, accuracy and repeatability.

If Synchrotron Radiation Instrumentation is your interest the JUV SRI Product line for Light Sources includes Monochromators for X-ray Beam lines, Front-ends, Photon and Safety Shutters. Other SRI products include Collimators, Mask assemblies, Mirror chambers and Safety Shutters.

If your research is in Electro-photonic, Opto-electronics or Semi-conductor devices the JUV 6000 series combine the latest E-Beam Evaporation, ECR-CVD and ICP-CVD deposition technology.

If your research is in Materials Science, Nano Technology or Super Conductivity the JUV 6100 series combine the latest in RF-DC Sputtering, RF-ICP Plasma Spray and Pulsed LASER (PLD) deposition technology.

If you require products for testing of Satellite Instruments such as IR Sensors our products for the Aerospace Industry include Blackbodies, Bench coolers and Space Simulation Systems.

Also, with our staff of engineers with vacuum and cryogenic experience JUV leads the industry in CUSTOM design and manufacturing capabilities. Why not put the JUV team to work for you.

Business Website Address: http://www.ultrahivac.com/
k-Space Associates, Dexter MI, USA
Address: 2182 Bishop Circle East, Dexter, MI 48130, USA
Long Business Description:

k-Space Associates, Inc. is a leading manufacturer of in situ, in-line, and ex situ metrology tools for the semiconductor, thin-film, and photovoltaic (PV) industries. Our tools are used for monitoring nearly all thin-film deposition processes, including MBE, MOCVD, PLD, PVD, sputtering, and evaporation. Incorporated in 1992 and driven to supply the best technical support in the industry, our tools are used worldwide in both research and full production monitoring of semiconductor, PV, thin-film deposition, annealing, and processing applications.

kSA products measure important parameters such as temperature, deposition rate, film thickness, stress, curvature, bow, reflectivity, surface roughness, and many other material properties. These are measured in real-time by utilizing probes such as lasers, white light, UV light sources, and electron beams to investigate thin-films and substrates at an atomic level. Our thin-film analysis tools are used to extract real-time information from today’s most advanced deposition and processing applications within compound semiconductor, silicon semiconductor and photovoltaic advanced thin film production and R&D.
Sophisticated software analysis and reporting capabilities provide information to better understand tomorrow’s electronic and optoelectronic devices or to provide online control during mass production to enhance yield. Tailored optics and fully integrated solutions have been designed for simple mounting and non-invasive monitoring of advanced deposition processes such as:
MBE
Sputtering
PLD
E-beam Evaporation
MOCVD
Ex Situ Characterization

Business Website Address: http://www.k-space.com/