Modal analysis of a four-bar linkage MEMS microgripper with co-operative electrostatic actuation
Andrea Rossi, Nicola Pio Belfioredownload PDF
Abstract. MEMS-Technology based microgrippers have been recently used in different fields of applications. These microsystems can be actuated by means of electrostatic actuators, such as linear or rotary comb drives, but the robustness and feasibility of such components in static and as well as dynamic conditions still raises some concerns. In order to contribute to fill this gap, the dynamic properties of a MEMS-Techology Based silicon microgripper, based on four-bar linkage, with co-operative comb-drives, are here numerically analysed. The analysis of the vibrations is essential in many MEMS applications since vibrations may lead to significant positioning errors or undesirable contacts between the anchored and floating fingers of the comb-drives. The present investigation aims to assess the critical modes of a MEMS microgripper in order to ascertain the possibility of impact between the fixed and moving fingers of the comb-drives. The relative displacements between the anchored and the floating fingers are tolerable only if the center of the relative rotation is coincident with the center of the conjugate profiles. Hence, the nature of the relative motion for the first vibration modes has been assessed by means of Finite Element Analysis (FEA) in order to avoid operational issues.
MEMS, Comb Drive Actuators, Modal Analysis
Published online 3/17/2022, 6 pages
Copyright © 2023 by the author(s)
Published under license by Materials Research Forum LLC., Millersville PA, USA
Citation: Andrea Rossi, Nicola Pio Belfiore, Modal analysis of a four-bar linkage MEMS microgripper with co-operative electrostatic actuation, Materials Research Proceedings, Vol. 26, pp 647-652, 2023
The article was published as article 104 of the book Theoretical and Applied Mechanics
Content from this work may be used under the terms of the Creative Commons Attribution 3.0 license. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
 Lobontiu, N.; Garcia, E.; Canfield, S. Torsional stiffness of several variable rectangular cross-section flexure hinges for macro-scale and MEMS applications. Smart Mater. Struct. 2004, 13, 12–19. https://doi.org/10.1088/0964-1726/13/1/002
 Belfiore, N.P.; Broggiato, G.B.; Verotti, M.; Balucani, M.; Crescenzi, R.; Bagolini, A.; Bellutti, P.; Boscardin, M. Simulation and construction of a mems CSFH based microgripper. Int. J. Mech. Control 2015, 16, 21–30.
 Balucani, M.; Belfiore, N.;Crescenzi, R.; Verotti, M. The development of a MEMS/NEMS-based 3 D.O.F. compliant micro robot. Int. J. Mech. Control 2011, 12, 3–10. https://doi.org/10.1109/RAAD.2010.5524590
 Botta F, Rossi A, Belfiore NP. A Feasibility Study of a Novel Piezo MEMS Tweezer for Soft Materials Characterization. Applied Sciences. 2019; 9(11):2277. https://doi.org/10.3390/app9112277
 Howell, L.L.; Midha, A. A method for the design of compliant mechanisms with small-length flexural pivots. J. Mech. Des. Trans. ASME 1994, 116, 280–290. https://doi.org/10.1115/1.2919359
 Demaghsi, H.; Mirzajani, H.; Ghavifekr, H.B. A novel electrostatic based microgripper (cellgripper) integrated with contact sensor and equipped with vibrating system to release particles actively. Microsyst. Technol. 2014, 20, 2191–2202. https://doi.org/10.1007/s00542-013-1989-3
 Valtorta, D.; Mazza, E. Dynamic measurement of soft tissue viscoelastic properties with a torsional resonator device. Med. Image Anal. 2005, 9, 481–490. https://doi.org/10.1016/j.media.2005.05.002