S. BOULMELH, L. SACI, F. MANSOUR, R. MAHAMADI
Abstract. Undoped Zinc oxide (ZnO) thin films were de-posited onto microscope glass substrates in the temperature range of 300 °C – 450 °C using spray pyrolysis technique. The study of the composition and structural properties of these films were investigated by means X-ray diffraction and Raman spectroscopy versus the increasing substrate temperature (Ts). The XRD results presented that the films prepared at a substrate temperature greater than 300 °C exhibit the hexagonal wurtzite with a preferential orientation along the (100) direction. Furthermore, the lattice parameters showed that the presence of low micro-stresses and the crystallinity of all samples were improved with thermal annealing. The Raman spectroscopy results showed, the presence of the E2low, E2high located around 98 cm-1 and 437.5 cm-1 respectively, and the deconvolution of the band located between 520cm-1 and 620cm-1 were formed of an E1(LO), A1(LO) located about 581cm-1 and 551cm-1 , these phonons modes were interpreted by ZnO wurtzite phase. In addition, the shift of the position of E1 (LO), A1 (LO) peaks indicates the presence of micro-stress in the deposited layers. The results obtained are in good agreement with those found by XRD. Finally, the obtained results showed that the deposited films can be used as components in micro technology to know biosensors.
Spray Pyrolysis, Undoped ZnO, XRD, Raman, Substrate Temperature
Published online 12/10/2016, 4 pages
Copyright © 2016 by the author(s)
Published under license by Materials Research Forum LLC., Millersville PA, USA
Citation: S. BOULMELH, L. SACI, F. MANSOUR, R. MAHAMADI, ‘Structural and composition properties of ZnO thin films elaborated by spray pyrolysis’, Materials Research Proceedings, Vol. 1, pp 104-107, 2016
The article was published as article 26 of the book Dielectric Materials and Applications
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