A novel prototype of diaphragm valve for passively compensated aerostatic pads

A novel prototype of diaphragm valve for passively compensated aerostatic pads

Federico Colombo, Luigi Lentini, Terenziano Raparelli, Andrea Trivella

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Abstract. Thanks to their low friction, aerostatic pads are currently used in many high precision applications. However, due to the air compressibility, aerostatic bearings suffer from relatively low stiffness and damping. Active and passive compensation methods represent a valuable solution to reduce these limitations. This paper presents a novel prototype of a diaphragm valve for passively compensated aerostatic pads. The proposed valve was obtained through the improvements of a previous prototype. The main goal of this new design of the valve was to improve the reliability, repeatability and accuracy of regulation. The novel prototype is modelled through the same lumped parameter model that was used for the previous prototype. The preliminary experimental results demonstrate the efficiency and effectiveness of the proposed valve.

Keywords
Air Pad, Gas Bearings, Infinite Stiffness, Compensation, Diaphragm Valve

Published online 3/17/2022, 6 pages
Copyright © 2023 by the author(s)
Published under license by Materials Research Forum LLC., Millersville PA, USA

Citation: Federico Colombo, Luigi Lentini, Terenziano Raparelli, Andrea Trivella, A novel prototype of diaphragm valve for passively compensated aerostatic pads, Materials Research Proceedings, Vol. 26, pp 195-200, 2023

DOI: https://doi.org/10.21741/9781644902431-32

The article was published as article 32 of the book Theoretical and Applied Mechanics

Content from this work may be used under the terms of the Creative Commons Attribution 3.0 license. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.

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