Influence of the Technology of Obtaining the Material of the Cathode of the Cu – Fe System at the Depth of Penetration of Ions into the Titanium Target
Viktor V. Ovchinnikov, Elena V. Luk’yanenko, Irina A. Kurbatova, Svetlana V. Yakutina, Nadezda V. Uchevatkinadownload PDF
Abstract. The article presents the results of the influence of the technology of obtaining the material of the cathode of the implanter of the Cu – Fe system on the penetration depth of the titanium alloy VT20. It is shown that the use of 50% Cu – 50% Fe material as the material of the cathode of the implanter, obtained by alloying copper and iron, leads to a better increase in the thickness of the ion-doped layer than the use of the cathode obtained by powder metallurgy.
Titanium Alloys, Ion Implantation, Implanter Cathode, Penetration Depth, Cluster Ions
Published online 1/5/2022, 6 pages
Copyright © 2022 by the author(s)
Published under license by Materials Research Forum LLC., Millersville PA, USA
Citation: Viktor V. Ovchinnikov, Elena V. Luk’yanenko, Irina A. Kurbatova, Svetlana V. Yakutina, Nadezda V. Uchevatkina, Influence of the Technology of Obtaining the Material of the Cathode of the Cu – Fe System at the Depth of Penetration of Ions into the Titanium Target, Materials Research Proceedings, Vol. 21, pp 421-426, 2022
The article was published as article 70 of the book Modern Trends in Manufacturing Technologies and Equipment
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