MicroSense LLC, Lowell MA, USA
MicroSense, LLC, previously known as ADE Technologies, is comprised of three primary businesses precision capacitive sensors, vibrating sample magnetometers and magneto-optical Kerr effect (MOKE) tools for state-of-the-art magnetic measurement and wafer measurment systems. Until the company was sold in November, 2009, we were a subsidiary of KLA-Tencor Corporation, a leading global supplier of semiconductor wafer defect inspection and metrology tools. MicroSense serves a host of industries including semiconductor equipment, data storage, machine tool, solar, automotive and high brightness LED.
MicroSense provides capacitive sensors and OEM metrology modules, based on patented capacitive sensing technology, to make very precise, high bandwidth measurements of precision products such as solar wafers, sapphire wafers, hard disk drive motors, air bearing spindles, precision X-Y stages, optical disks, automotive parts and machine tools. Our capacitive displacement sensors provide the highest resolution in the industry, less than 0.05 nanometers, exceptional stability and virtually unlimited service life.
MicroSense offers high-sensitivity wafer measurement tools for characterizing sapphire, silicon carbide and various types of semiconductor wafers. MicroSense acquired SigmaTech, Inc. of Tempe, Arizona in June, 2012. With this acquisition, MicroSense added leading-edge wafer inspection tools to its portfolio of innovative metrology solutions. SigmaTech systems integrate multiple sensing technologies such as optical spectrometry, interferometry and SigmaTech’s patented auto-positioning back pressure (APBP) technology.
Solar Wafer Thickness Metrology
Vibrating Sample Magnetometer VSM
Dimensional Wafer Metrology Systems