Plasma Technology

40 S Linden St., Duquesne, PA 15110, USA

Mark Bernick founded Angstrom Sciences, Inc. in 1988 to supply advanced magnetrons and refined materials for plasma vapor deposition of high quality thin films. With a strong focus on research and development, the company soon patented several technical advancements in magnetics, water-cooling, and circular magnetron target clamping designs.

Magnetron sputtering technology has been utilized in production applications for several decades. The basic technology used to control process plasma within the deposition process is well established within the field; however the capabilities available to optimize process efficiencies, such as thin film uniformity, target utilization, and deposition rate, are continuously evolving.
Angstrom Sciences is focused upon the development of magnetron sputtering cathodes that optimize sputter process performance. The Angstrom Advantage™ is the collective set of technical and structural advancements Angstrom Sciences has designed into its magnetrons in order to provide its clients with the most control over their thin film deposition process
Angstrom Sciences strives for all our customers to have complete satisfaction with our products. We offer a 2-year warranty against defects in workmanship and materials on all our magnetrons, which is the longest in the industry. We offer unlimited post-sale support to all our customers. With over 25 years of experience in the industry, we have a wealth of knowledge not only on magnetrons, but the processes they are used in. We feel it is important to share this knowledge with our customers, so that they are successful. We feel that our continued success is driven by that of our customers

We use only the highest qualtity materials, design and manufacturing techniques in order to provide the best possible product. Our in-house manufacturing capabilities along with a full-scale R&D and test lab give us the ability to fully control design development, manufacturing, and pre-shipment testing for on-time deliveries.

Products
Magnetron Technology
Magnetrons
PVD Materials
Reactive Gas Control
PVD Coating R&D

http://www.angstromsciences.com/
Fax: +1-412-469-8511
Arradiance, LLC, Sudbury MA, USA
142 North Rd., Ste. F-150, Sudbury, MA 01776, USA

Founded in 2003, Arradiance® combines unique talents in material science, charged particle physics, equipment design, modeling, simulation, vacuum technology, and metrology providing world class application of Atomic Layer Deposition(ALD) and Plasma Enhanced Deposition(PEALD) to the GEMStar XT product line.

With a concentration in Atomic Layer Deposition, charged particle physics and amplification, Arradiance is the first to develop and demonstrate the capability of producing high gain, low noise, and long life micro channel amplifiers. Using Atomic Layer Deposition (ALD) materials and equipment, Arradiance offers a new approach to electron amplification devices replacing the legacy traditional lead-glass/hydrogen firing process developed in 1960’s currently used for all state-of-the-art MCP applications.

Arradiance Atomic Layer Deposition (ALD) technology enables research in many areas:
MCP (Micro Channel Plate) Electron Amplification
Catalysis Systems
Medical Imaging
Space Sciences
Solar Cells
Night Vision
Alternative Energy
Thermal and Fast Neutron Detection

http://www.arradiance.com
46 Chestnut St., Norwalk, CT 06854, USA

COOKE VACUUM designs and manufactures a wide range of standard and custom high and ultrahigh vacuum systems intended for research and production. With five decades of experience, and thousands of units in the field, COOKE VACUUM has come to symbolize economy and versatility,
Cooke Vacuum Products was established in the late 1950’s during an exciting period of experimentation in vacuum technology, especially thin film coating and materials research. From the beginning, Cooke had to pioneer new applications and new tools for the emerging semiconductor and optical industries, and for the related research laboratories.
Over the next decades, Cooke continued to support R&D by developing pumping systems, resistance evaporation, electron-beam, sputtering, and plasma sources, often in close collaboration with customers. Vacuum environmental chambers were developed for the space industry, encapsulation and bake systems for early flat panel displays. New, and highly specialized equipment was made for the quartz crystal industry, as well as for production of printing foil, then holographic foil. We were there to make the first OLED systems, and the first glove-box processors.
Because of the emphasis on custom solutions, the company has remained relatively small, and is well-known for its ability to “engineer on demand” more than for volume production.

Processes/Products
Thin Film Deposition: Thermal Resistance; Electron Beam; Sputter; PLD; OLED and Glove Box Systems.
Etch/Ash/Surface Treatment: Plasma Etch; Reactive Ion Etch; Surface Activation and Modification.
Test and Specials: Environmental Test; Space Simulators; Vacuum Ovens: Laser Die Attach.

http://www.cookevacuum.com/
1259 North Church St. Bldg 3, Moorestown, NJ 08057, USA

Denton Vacuum transforms barriers into thin-film technology breakthroughs for customers across the globe in providing vacuum deposition systems. With operations in the United States and China, Denton engineers, designs and develops systems that precision-coat aerospace components, advanced optics, medical implants, solar cells, semiconductor devices and much more. Denton’s technology portfolio includes thermal evaporation, ion beam etching, ion-beam-assisted evaporation, plasma-enhanced-chemical-vapor deposition (PECVD), and ion-beam-assisted deposition (IBAD) and e-beam evaporation and magnetron sputtering system (including reactive sputtering). Denton also provides value-added services and lifetime support that set new industry standards. Fifty years of tireless innovation have produced robust offerings ranging from high-volume production platforms to unique custom-engineered systems.

Techniques
Ion Beam Assisted Deposition
Ion Beam Deposition
Ion Beam Etchning
PECVD
PVD
Magnetron Sputtering
Reactive Beam Etch
Sputtering
Thermal Evaporation

http://www.dentonvacuum.com
Energetiq, Woburn MA, USA
7 Constitution Way, Woburn, MA 01801, USA

Energetiq is a developer and manufacturer of advanced light sources that enable the manufacture and analysis of nano-scale structures and products. Used in complex scientific and engineering applications such as analytical instruments for life sciences and leading edge semiconductor manufacture, Energetiq’s light products are based on new technology that generates high brightness across the spectrum, from 1nm to 1000nm and beyond, with high reliability, long operating life, and in a compact package.
Energetiq’s light sources are used for: analytical spectroscopy, microscopy, and sensing in the life-sciences; lithography, metrology and photoresist development in semiconductor manufacturing; soft x-ray microscopy; and a variety of applications where synchrotron radiation and traditional arc-lamps have commonly been used.
Energetiq was founded in March 2004 by an experienced high technology development team with deep understanding of the high power plasma physics needed for high performance light products used by semiconductor equipment manufacturers, semiconductor wafer fabs, life sciences industries and the scientific research community. The expertise and experience of this team enables Energetiq to provide products with the highest levels of performance and reliability.

http://www.energetiq.com/
Harrick Plasma, Ithaca NY, USA
120 Brindley Street, Ithaca, NY 14850, USA
Harrick Plasma is a leading supplier of plasma equipment to the research community. We have been providing quality, low-cost, tabletop plasma cleaners for use in research labs for over 30 years. Our plasma products have been cited in over 3000 publications and nearly 150 patents, covering a wide variety of technical fields, including materials science research, microfluidics, and biomedical engineering.

Harrick Plasma is a leading supplier of plasma equipment to the research community. We have been providing quality, low-cost, tabletop plasma cleaners specifically designed for use in university, government, and industrial research labs for over 30 years. Our plasma products have been cited in over 3000 publications and nearly 150 patents, and cover a wide variety of technical fields, including materials science research, microfluidics, and biomedical engineering, and cell biology studies. In addition, plasma treatment has been applied to many different materials as well as complex surface geometries, such as glass coverslips and slides, semiconductor wafers, fibers and fibrous scaffolds, metal and oxide nanoparticles, and porous membranes.

Products:
Basic Plasma Cleaner
Expanded Plasma Cleaner
High Power Expanded Plasma Cleaner
PlasmoFlo Gas Flow Mixer
Vacuum Pumps
Chambers and Sample Trays

harrickplasma.com
607-272-5070
3880 Park Avenue, Edison, NJ 08820-3097, USA

The HORIBA Group of worldwide companies provides an extensive array of instruments and systems for applications ranging from automotive R&D, process and environmental monitoring, in-vitro medical diagnostics, semiconductor manufacturing and metrology, to a broad range of scientific R&D and QC measurements. Proven quality and trustworthy performance have established widespread confidence in the HORIBA Brand.

HORIBA International Corporation (HIC) commands successful leadership spanning North and South America with operations positioned coast-to-coast, including Canada and Brazil. HIC, financial holding company for all Americas-region entities, continues to experience active growth while implementing the sharing of corporate resources. Exemplifying a unified contribution to global environmental conservation, HORIBA continues its spirited commitment to society.

Science Applications include:
Atomic Emission Spectroscopy
Detectors-CCD, PDA, InGaAs
Gratings
Elemental Analyzers
Ellipsometers
Fluorescence Spectroscopy
Forensics
Glow Discharge
Microanalysis

Materials Characterization
Raman Microscopy
Photoluminescence
Fluorescence
Particle Characterization
Micro-XRF
Plasma Profiling TOFMS

www.horiba.com
1845 Maryland Ave., Niagara Falls, NY 14305, USA

We have a long standing commitment to quality and excellence in the high vacuum industry. Started in 1967 the company is a leader in manufacture of high vacuum equipment for thin film coating and etching.
Intlvac Thin Film’s primary goal is to deliver value-added solutions that exceed the expectations of simple PVD and Ion Beam Sputter/Etch machine manufacturing and installation.
We started exporting our systems around the world in 2001, and now have equipment installed across the US, and in Canada, Malaysia, Singapore, Australia, and Israel.
Research and development play a major role in our technology’s edge in the market. Our in-house development lab designs, engineers and manufactures machinery used for Physical Vapor Deposition and ion beam etching. We specialize in engineering solutions for a variety of specific results and outcomes using this process. We provide our customers with machinery needed for creating coatings including ion source and all parts needed to make it function. Additionally, we manufacture high quality PVD coatings using techniques such as Ion Assisted Thermal and Electron Beam Evaporation, Reactive and non-reactive magnetron sputtering. Diamond Like Carbon by Plasma Enhanced Vapor Deposition.
Intlvac Thin Film has become an authority for Ion Beam Etch/Sputter systems and reactive sputter systems for precision optical coatings.

Products & Services:
Thin Film Deposition Systems
Ion Beam Etch & Ion Beam Sputter Systems
Diamond-Like Carbon Systems
Optical Fiber Metalization
Thermal Vacuum & Space Simulation Systems
Ion Sources

http://www.intlvac.com/
Fax: 716.284.0842
300 Baker Ave., Ste. 150, Concord, MA 01742-2124, USA

Oxford Instruments aims to pursue responsible development and deeper understanding of the world through Science & Technology.

As one of the first commercial spin-out companies from Oxford University, this vision has been at the heart of our business for over 50 years. We use innovation to turn smart science into world-class products that support research and industry to address the great challenges of the 21st Century.

Products:
Analyzers
Atomic Force Microscopy
Coating Thickness Measurement
Cryogenic Systems
CT & MRI Systems
Microanalysis Systems
Nanomanipulation
Plasma, ALD and Ion Beam
Spectrometers
Superconducting Magnets and Wire
X-Ray Tubes and Integrated Sources

http://www.oxford-instruments.com
Tel +1 978-369-9933
Plasma Etch, Carson City NV, USA
3522 Arrowhead Drive, Carson City, NV 89706, USA

Plasma Etch, Inc. has been a leader, innovator, and producer of plasma technology since 1980. Companies such as Nasa, Boeing, Honeywell, Motorola, Bayer and Lockheed-Martin have employed our plasma cleaners and plasma etchers over the decades due to their superior performance and results. We’ve developed a wide range of solutions for plasma cleaning, plasma etching, reactive ion etching (RIE), plasma treatment, surface modification, and other facets of plasma processing.

Our company, headquartered in Carson City, NV in a custom-built factory, is focused on designing and producing cutting edge technology and plasma equipment for every industry and application. From scientific research to manufacturing and everything in between, we have an ideal solution.

http://www.plasmaetch.com/