Electron Beam Technology

Anatech, Hayward CA, USA
30695 Huntwood Ave, Hayward, CA 94544, USA

Anatech USA’s mission is to provide technical solutions for surface engineering challenges.
Anatech USA delivers high vacuum systems with graphic state-of-the-art, “Touch-Panel” intuitive control packages. Every effort is made to tailor the system to meet your needs and budget requirements.
Thin Film Deposition equipment for metals and dielectrics, using Planar Magnetron sources powered by DC and/or RF supplies. Electron Beam and Thermal Resistance source systems are also available.
Gas Plasma vacuum systems with quartz or aluminum chambers. Systems are designed to clean at the molecular level, activate surfaces or etch surfaces.
Anatech USA works to deliver systems with consistent value and quality that meet or exceed our customer’s expectations.

http://www.anatechusa.com
k-Space Associates, Dexter MI, USA
2182 Bishop Circle East, Dexter, MI 48130, USA

k-Space Associates, Inc. is a leading manufacturer of in situ, in-line, and ex situ metrology tools for the semiconductor, thin-film, and photovoltaic (PV) industries. Our tools are used for monitoring nearly all thin-film deposition processes, including MBE, MOCVD, PLD, PVD, sputtering, and evaporation. Incorporated in 1992 and driven to supply the best technical support in the industry, our tools are used worldwide in both research and full production monitoring of semiconductor, PV, thin-film deposition, annealing, and processing applications.

kSA products measure important parameters such as temperature, deposition rate, film thickness, stress, curvature, bow, reflectivity, surface roughness, and many other material properties. These are measured in real-time by utilizing probes such as lasers, white light, UV light sources, and electron beams to investigate thin-films and substrates at an atomic level. Our thin-film analysis tools are used to extract real-time information from today’s most advanced deposition and processing applications within compound semiconductor, silicon semiconductor and photovoltaic advanced thin film production and R&D.
Sophisticated software analysis and reporting capabilities provide information to better understand tomorrow’s electronic and optoelectronic devices or to provide online control during mass production to enhance yield. Tailored optics and fully integrated solutions have been designed for simple mounting and non-invasive monitoring of advanced deposition processes such as:
MBE
Sputtering
PLD
E-beam Evaporation
MOCVD
Ex Situ Characterization

http://www.k-space.com/
RBD Instruments Inc., Bend OR, USA
2437 NE Twin Knolls Dr., Suite 2, Bend, OR 97701, USA
Provider of surface analysis systems and components and tools for materials science. Including sputter ion guns, signal detection solutions, thin film surface analysis, water vapor desorption, UV sources and in situ rapid specimen heating.

RBD Instruments was founded in 1990 as a parts and service supplier for PHI (Perkin Elmer, Physical Electronics) Auger, XPS, and SIMS systems and components. Over the next 27 years, our company has become the world-wide leader in the development of software and hardware upgrade products for many legacy surface analysis systems.

Since then, RBD has gone on to produce innovative products for the high-vacuum and ultra high-vacuum industries. Our customers include world-leading research centers, universities, and manufacturers.

Products:
Surface analysis systems & components –   Compact Auger Electron Spectrometer (CMA)
Sputter ion sources – Popular IG2 package is the lowest priced sputter solution on the market
Electron & ion current measurement – 9103 USB data logging picoammeter floats up t0 1500V DC
Water vapor desorption – Remove water vapor and hydro carbons
UHV accessories – Copper gaskets, ion gauge filaments, sputter standards
Surface analysis software – Upgrades for Physical Electronics XPS and AES systems

We also provide refurbished PHI XPS X-ray Photo Electron Spectrometer systems that include installation and a full one year warranty

http://www.rbdinstruments.com
541-330-07233
Scanwel, Gwynedd, UK
The Old School, Llandderfel Bala, Gwynedd, LL23 7HW, UK
Manufacturer
Of vacuum fabrications, chambers, kits & systems
Stockist
Of in-house manufactured vacuum components
Distributor
Of leading vacuum, surface & nanoscience products

Established in 1974, Scanwel is a leading manufacturer and distributor of components and systems to end users and o.e.m.s in academia, government laboratories and industry.
Our products find application in the production and development of advanced materials and processes in a number of high technology fields, including nanotechnology, microelectronics, storage media, energy production and bio-medical and basic materials research of metals, oxides, polymers and coatings.

production and bio-medical and basic materials research of metals, oxides, polymers and coatings.

    • We specialise in producing custom fabrication and chambers, for clean and UHV applications.
    • Our custom systems are exactly that, conceived and designed with your full involvement using our experience and the latest CAD packages. The end result is a product that meets your requirements.

 

http://www.scanwel.co.uk
+44 (0)1678530281
Thermic Edge Ltd, East Sussex, UK
30 Brunel Road,, St. Leonards on Sea, East Sussex TN38 9RT, UK

Thermic Edge Ltd is a design and manufacturing business with specialist knowledge of every kind of laboratory heating applications, from basic elements or sample heaters, to complete hot stages with rotation, manipulation and substrate bias. We have standard ranges of stand alone sample heaters and flange mounted sample heaters with feedthroughs incorporated. Our sample heaters and hot stages are used in a very wide range of laboratory applications including, PVD sputtering, thermal deposition, e-beam, CVD, MOCVD, PLD, ion beam implanters, carbon nanotubes and graphene growth.

Thermic Edge Ltd can offer a range of sample heater controllers to accurately control any kind of hot stage or sample heater. Heater controllers are fitted with Eurotherm PID temperature controllers as standard, but we can incorporate any type of controller that our customers might specify.

Thermic Edge Ltd  also has a range of high temperature laboratory vacuum / inert atmosphere furnaces with graphite hot zones. These furnaces can heat a crucible or wafer to 2100C. All furnaces are plc controlled and are fully interlocked, with simple one button pump / vent operation. A choice of PID temperature controllers enables a high degree of control and programmable temperature ramping and cooling functions. Dual zone temperature control on flat wafer furnaces gives very high uniformity across the substrate.
We can offer a complete range of technical ceramic materials and components including Shapal, Macor, Alumina, Boron Nitride, Aluminium nitride and Quartz. We can also offer CVD produced ceramics such as pyrotytic boron nitride PBN and pyrolytic graphite.

http://www.thermic-edge.com
TREK, INC., Lockport NY, USA
190 Walnut Street, Lockport, NY 14094, USA
Decades of design and manufacturing expertise in electrostatics and high voltage amplifiers provide a firm foundation for Trek to offer high performance products that address needs for measurement and power solutions in research and industry.

For nearly 50 years, TREK , INC. has been providing innovative electrostatic measurement and high-voltage power solutions to customers worldwide. Trek’s superior engineering design capability and manufacturing facilities allow us to provide high quality, cost-effective products and services to meet market needs and customer-specific applications.

Our proprietary technology and technical expertise, coupled with our long-term relationships, sets us apart from our competitors and has made us the leader in the markets we serve.

Trek’s commitment to develop new technologies will enable us to continue to provide current and future customers with innovative solutions.

A significant portion of Trek’s business is derived from the design and manufacture of custom products for OEM customers. Trek has been supplying solutions to some of these customers for over 20 years. Although we cannot disclose information about our custom OEM designs, the following provides some perspective on our capabilities. If this information interests you, please contact us to initiate a dialogue regarding your specific requirements for custom-designed product solutions.

Applications:
Electrophotography
ESD
Piezoelectronics
Research & Development
Semiconductor
Power Amplification

Metrology: These products are used for precision measurements of voltage and surface charge distributions; resistance and resistivity meters are also utilized.

http://www.trekinc.com/
+1-716-438-7555
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10 Angstroms, Billerica MA, USA
6 Executive Park Drive, North Billerica, MA 01862, USA
10 Angstroms sells and services the complete line of Elionix electron beam lithography (EBL) products in North America.

10 Angstroms is a new company dedicated to bringing innovative systems and equipment to the R&D market. We provide both sales and service for advanced instrumentation. We enjoy our role in working with both the customer and manufacturer in the ever changing nanotechnology field. With more than 30 years of high technology sales and service experience, we understand the expectations required to satisfy all stakeholders. As your trusted and valued partner, we will help to ensure that we are responsive and offer the best solutions possible.
10 Angstroms sells and services the complete line of Elionix electron beam lithography (EBL) products in North America.

http://www.10angstroms.com/
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Axic, Milpitas CA, USA
891 Ames Ave., Milpitas, CA 95035, USA

AXIC, Inc. was founded in 1980 as a company to develop surface science equipment for the semiconductor, electronics, and general scientific community. Initial developments focused on x-ray and electron beam analysis of surfaces for compositional and film thickness analysis. These developments lead to the introduction of a stand alone x-ray fluorescence unit which was easily operated by fab personnel for the measurement of film composition and thickness. AXIC, Inc. now produces 3 XRF systems for coatings analysis in both development and production applications for the semiconductor, magnetic, and superconductor industries.

In 1992, AXIC entered the market of producing laser based reflectometers for the measurement of film thickness, index of refraction, and film absorption properties of transparent/translucent films for the semiconductor, optical and magnetics industries.

Shortly after, AXIC commenced the manufacture of plasma tools for cleaning, photoresist stripping, reactive ion etch (RIE), and plasma enhanced chemical vapor deposition (PECVD). Today these offerings include the MultiMode HF8, PlasmaStar, and BenchMark 800-II. Units are ideally suited for research and development and small scale productions. The plasma tools can be configured in various ways to meet the end users’ specific requirements.

http://www.axic.com/
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Cambridge Vacuum Eng., Cambridge, UK
Denny Industrial Centre, Pembroke Avenue, Waterbeach, Cammbridge CB25 9QX, UK

CVE designs and builds process solutions and has more than 50 years experience manufacturing Electron Beam (EB) systems and Vacuum Furnaces (VF’s) from its base in Cambridge UK.

In Collaboration with TWI CVE’s range of equipment includes systems ranging from 50 to 200 kV with beam powers up to 100 kW.

Professional engineering skills are applied to customer requirements resulting in innovative solutions to technical problems. The company’s skilled workforce, experienced engineering department and extensive service team are backed up with a range of in-house test and diagnostic facilities. CVE offers true global coverage from itssales and service centres in the UK and worldwide.

Cambridge Vacuum Engineering’s roots begin in the late 1950’s in Cambridge, England with the founding of Torvac, a company specialising in the manufacture of Electron Beam Welders and Vacuum Furnaces.

A break-a-way group formed Wentgate Engineers in the mid 1960’s and for many years the two companies traded in competition.

Torvac purchased the Hawker Siddley Dynamics “Dynaweld” technology, which added 150kV welders to their range.

Through the process of acquisition, both Wentgate and Torvac became owned by Thermal Scientific and in the late 1980’s, under their new TI Group ownership, the companies moved to their present site, rationalised themselves and began trading under the name, Cambridge Vacuum Engineering. Since October 2001 the company has been owned by Aquasium Technology Ltd.

2007 has seen strengthening of the CVE brand with WDI in the States now being known as CVE Inc.

CVE today manufactures Electron Beam Welders and Vacuum Furnaces . They also provide spares and service support for the 50 year history of Torvac, Wentgate and Dynaweld products.

CVE operates a Quality Management System which complies with the requirements of BS EN ISO 9001:2008.

http://www.camvaceng.com/
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El-Mul Technologies, Rehovot, Israel
12 Hamada St., Rehovot, 76703, Israel

El-Mul Technologies is an innovative and experienced solution provider and OEM manufacturer of in-vacuum charged particle detection systems and devices.
With over 20 years of experience, El-Mul is recognized for its ground-breaking products, world-class quality standards and dedicated service.
El-Mul’s products are specially designed for advanced analytical SEM/TEM systems, focused ion beam (FIB) tools, inspection and metrology semiconductor e-beam tools, mass spectrometry and other vacuum systems

http://www.el-mul.com/